ZOOM measuring lens

Task:

Development of an integrative assembly for measuring the focal length of large lenses in an exposure device within a semiconductor production line.

Challenge:

Highest precision and reliability in continuous operation while adhering to the installation conditions.

CEMEC’s solution:

• Positioning of two lenses better than 2µm over a distance of 60.0mm without a control loop
• Zoom path adjustable cardanically through the optical axis
• Implementation incl. validation up to series maturity

Scope of services of CEMEC:

• Development 100% / In-house production 90%
• Prototype creation, validation, documentation
• Delivery of the series

Added value for the customer:

• Only one contact person for development and (series) production
• Possibility of uncomplicated product adaptation in the future